Mechanisms of Nano-Shorts in the Electrical Breakdown of Ferroelectric Thin Films

XJ Lou,XB Hu,M Zhang,SAT Redfern,JF Scott
DOI: https://doi.org/10.1080/10584580500413772
2005-01-01
Integrated Ferroelectrics
Abstract:Micro-Raman, SEM and electron nano-probe techniques are used to show that bismuth titanate thin films undergoes a local phase transformation from layered-perovskite structure to pyrochlore-like structure during filamentary electrical breakdown, with the loss of Bi and oxygen. In PZT, dendrite-like structures (precursors of electrical shorts) of a few microns diameter, produced by bipolar voltage cycling (i.e. fatigue), exhibit almost pure regions of alpha-PbO, beta-PbO and rutile-TiO2. Note that beta-PbO is not the stable ambient phase.
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