Fabrication of Diamond Thin Films with High Quality on Microcylindrical Substrates

Ma Yuping,Wang Yong,Sun Fanghong,Chen Ming
DOI: https://doi.org/10.1504/ijnm.2006.011381
2005-01-01
Abstract:The study on deposition of diamond thin films on tungsten wire substrate with a gas mixture of acetone and hydrogen by using bias-enhanced hot filament CVD with the tantalum wires being optimised was carried out. The quality of the diamond film was tested by Scanning Electron Microscopy (SEM) and Raman spectroscopy. The effect of deposition technology on the nucleation and growth of diamond crystals was analysed. The results show that the cylindrical diamond thin films with good quality and uniform thickness have been obtained on microtungsten wires, which laid a foundation for subsequent fabrication of self-supported diamond tubes and deposition of diamond coatings on the rotating tools.
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