Abstract:Al-doped zinc oxide thin films are prepared on glass slides by sol-gel process at room temperature plus heat post-treatment.X-ray diffraction(XRD) and scanning electron microscope(SEM) are employed to analyze the composition,structure and morphology of the films.Ultraviolet-visible spectrophotometry is applied to measure trans-mittance properties of the films.Results show that the thin films obtained possess hexagonal wurtzite structure with highly preferred orientation along the(002) plane.Al~(3+) doping into ZnO films don't affect the basic ZnO crystal form of the films.It is found that the Al~(3+) substitutes the Zn's place in ZnO lattice,i.e.substitute doping.After heat treatment, Al~(3+)-doped ZnO grains show hexagonal needle-shaped(or pillar shape) crystal morphology.The higher the heat treatment temperature is,the better the transmittance of the films is.For the film after heating at 600℃,the transmit-tance of the film increases first and decreases afterwards with the increase of Al~(3+) doping concentration,the best transmittance presents at 2%of Al~(3+) doping concentration.The effect of lattice deformation arising from the dopants,which leads to the decrease of the transmittance of the film,can not be ignored at higher Al~(3+) doping concentration anymore.

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