Abstract:A mechanistic understanding of interactions be-tween atomically thin two-dimensional (2D) transition-metal dichalcogenides (TMDs) and their growth substrates is important for achieving the unidirectional alignment of nuclei and seamless stitching of 2D TMD domains and thus 2D wafers. In this work, we conduct a cross-sectional scanning transmission electron microscopy (STEM) study to investigate the atomic-scale nucleation and early stage growth behaviors of chemical vapor deposited monolayer (ML-) MoS2 and molecular beam epitaxy ML-MoSe2 on a Au(111) substrate. Statistical analysis reveals the majority of as-grown domains, i.e., similar to 88% for MoS2 and 90% for MoSe2, nucleate on surface terraces, with the rest (i.e., similar to 12% for MoS2 and 10% for MoSe2) on surface steps. Moreover, within the latter case, step-associated nucleation, similar to 64% of them are terminated with a Mo-zigzag edge in connection with the Au surface steps, with the rest (similar to 36%) being S-zigzag edges. In conjunction with ab initio density functional theory calculations, the results confirm that van der Waals epitaxy, rather than the surface step guided epitaxy, plays deterministic roles for the realization of unidirectional ML-MoS2 (MoSe2) domains on a Au(111) substrate. In contrast, surface steps, particularly their step height, are mainly responsible for the integrity and thickness of MoS2/MoSe2 films. In detail, it is found that the lateral growth of monolayer thick MoS2/MoSe2 domains only proceeds across mono-Au-atom high surface steps (similar to 2.4 angstrom), but fail for higher ones (bi-Au atom step and higher) during the growth. Our cross-sectional STEM study also confirms the existence of considerable compressive residual strain that reaches similar to 3.0% for ML-MoS2/MoSe2 domains on Au(111). The present study aims to understand the growth mechanism of 2D TMD wafers.

Spontaneous Formation of Mn Nanocluster Arrays on A Si(111)-7x7 Surface Observed with Stm

Atomistic Insight into the Epitaxial Growth Mechanism of Single-Crystal Two-Dimensional Transition-Metal Dichalcogenides on Au(111) Substrate

Templating ultra-small manganese isomers with preference for adsorption sites and narrow distribution tuned by different moiré periodicities of monolayer graphene on Ru(0001).

Preferential Nucleation and Self-Limiting Growth of Cu Nanoclusters on S(4 × 4)/W(111)

Epitaxial Growth of Manganese Silicide Nanowires on Si(111)-7×7 Surfaces

Formation mechanism of Fe atomic structures on Cu(111) surfaces

Epitaxy of Mn on Si(001): Adsorption, Surface Diffusion, and Magnetic Properties Studied by Density-Functional Theory

Behavior of small metal clusters on solid crystal surfaces

Growth of Zirconium Silicide Nanostructures on Vicinal and Flat Si(111)-7 × 7 Surfaces

Steps of Al/Si nanocluster studied by scanning tunneling microscope Moire method

Assembling and Disassembling Ag Clusters on Si(111)-(7×7) by Vertical Atomic Manipulation.

ARTIFICIAL METAL NANOCLUSTER CRYSTALS

Spontaneous fabrication of periodic identical nanocluster arrays by magic clustering process on nanostructured template

Phase Coexistence of Mn Trimer Clusters and Antiferromagnetic Mn Islands on Ir(111)

Atomic-scale Morphology and Electronic Structure of Manganese Atomic Layers Underneath Epitaxial Graphene on SiC(0001).

Microfabrication of Nanoscale Cluster Chains on A Patterned Si Surface

Hierarchical Structural Complexity in Atomically Precise Nanocluster Frameworks

Borderline Magic Clustering: the Fabrication of Tetravalent Pb Cluster Arrays on Si(111)-(7x7) Surfaces.

Steps of Al/Si Nanocluster Studied by Scanning Tunneling Microscope Moiré Method

Oxygen-Induced Migration of Ag Nano-Clusters on Si(111)-7 X 7 Surface