The Fabrication of Micro-Nano Structure Optical Fiber Sensor Used by Femtosecond Laser in Combination with Selective Chemical Etching
CHU DongKai,SUN XiaoYan,DONG XinRan,HU YouWang,ZHOU JianYing,WANG Cong,DUAN JiAn
DOI: https://doi.org/10.1360/n972015-00766
2016-01-01
Chinese Science Bulletin
Abstract:Femtosecond lasers,with extremely high peak power and ultra-short pulse duration,are widely applied in fibers,fusedsilica glasses,and other transparent materials.Studies using femtosecond lasers to fabricaed waveguides,grating,microfluidic channel,and other functional devices in these materials have been widely reported.Optical fiber sensor fabricated using a combination of femtosecond laser modification and selective chemical etching have various advantages,such as low volume,light quality,high resistance to electromagnetic interference,and high sensitivity.These sensors are a vital part in various fields of study.Also this method of fabrication using a combination of femtosecond laser modification and selective chemical etching can significantly improve the machining efficiency and precision.In this study,we introduce a new method by using the combination of femtosecond laser modification and selective chemical etching for fabrication of fibers with micro-nano structures.Based on the working principle of the sensor,the sensor can be classified into interference-mode,diffraction-mode,and mixed-mode sensors.In addition,the interferencemode sensor mainly includes Fabry-Perot (FP) and Mach-Zehnder (MZ) interference.Compared to conventional method,this method modulates the fiber core refractive index,causes the light field to come in direct contact with the test liquid,and greatly improves the sensitivity of the sensor.The diffraction mode consists of optical fiber Bragg grating (FBG) as well as micro channels and long period fiber grating (LPFG).As compared to other methods used to improve the sensitivity of the FBG and LPFG,this method can effectively maintain the mechanics performance of the material.The mixed mode included the system with lab-in-fibers.This method can integrate different types of functional components to meet the requirements,and simultaneously measure two or more important parameters.Because of this method there are more controllable parameters such as laser power,scanning speed,the corrosion time,corrosion liquid concentration,etc.By optimizing the processing parameters,an ideal three-dimensional (3D) structure can be obtained.The researches on this field started later in China;however,some institutions have already have made sufficient progress.With the need of industrial production,the improvement of laser processing technology,and assuming that this method will be persistently improved,many new types of fibers with micro-nano structures will be fabricated with broad application prospect.This article systematically introduced some reviewed structures and their test results.In addition,the advantages and disadvantages of the method are summarized and prospected.