Multi-walled Carbon Nanotube-Based Gas Sensors for NH3 Detection

SG Wang,Q Zhang,DJ Yang,PJ Sellin,GF Zhong
DOI: https://doi.org/10.1016/j.diamond.2003.11.070
IF: 3.806
2004-01-01
Diamond and Related Materials
Abstract:Multi-walled carbon nanotube (MWNT) based gas sensors for detecting gaseous molecules of ammonia (NH3) were developed. MWNTs were prepared using microwave plasma-enhanced chemical vapor deposition. The gas sensors, in which the nanotubes laid under the electrodes, were fabricated using electron-beam lithography and lift-off techniques. It is found that the conductance of MWNTs decreases when the sensors successively exposed to NH3 gas at room temperature of 25 °C. The MWNT-based sensors are sensitive to NH3 gas. This suggests that the MWNTs could be a good candidate material for NH3 detection at room temperature.
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