Structure and properties of Fe-containing polymer composite films prepared by PEMOCVD

Xiaogang Wen,Kunlin Zhou,Yong Zhang,Weimin Cao
DOI: https://doi.org/10.1016/S0040-6090(97)00085-0
IF: 2.1
1997-01-01
Thin Solid Films
Abstract:Composite Fe-containing polymer films have been prepared by the plasma-enhanced metal-organic chemical vapor deposition (PEMOCVD), using ferrocene (Cp2Fe) and H-2/Ar as precursor and working gas respectively. The structure and properties of films was characterized by X-ray photoelectron spectroscopy, Auger electron spectroscopy, transmission electron microscopy, transmission electron diffraction, and X-ray diffraction. The electrical and optical properties of the films were also investigated. The results show the films consist of microcrystalline Fe2O3 and Fe-C clusters embedded in an amorphous polymer matrix. The filling factor (f) of Fc affects the structure and properties of films greatly. (C) 1997 Elsevier Science S.A.
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