Design and Fabrication of Metal-Wire Nanograting Used As Polarizing Beam Splitter in Optical Telecommunication

L. Zhang,C. Li,Jing Li,F. Zhang,L. Shi
2006-01-01
Journal of optoelectronics and advanced materials
Abstract:We developed a metal-wire nanograting device as a polarizing beam splitter (PBS) for the optical telecommunication applications. Effective Medium Theory (EMT) was used for initial design and Rigorous Coupled Wave Analysis (RCWA) was used for optimization. We fabricate metal-wire nanogratings on glass substrate using nanoimprint lithography (NIL) and reactive ion etching (RIE) process. Experimental investigation shows that the PBS device has uniform performance with broadband wavelength and wide variations in the angle of incidence. These features with their small size make these PBSs desirable for use in optical telecommunication and allow more compact component designs.
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