The Application of AHP and Rule Based Multi-objective Dispatching Approach in Wafer Fabrication System

QUAN Peng,LI Na,JIANG Zhi-bin,MIN Ya-neng
DOI: https://doi.org/10.3969/j.issn.1007-5429.2011.04.019
2011-01-01
Abstract:This study proposed an AHP and rule based multi-objective dispatching approach to solve the time-variable multi-objective feature of semiconductor wafer fabrication system.The approach assigned distinct weights to the scheduling objectives over different manufacturing periods and derived the judgment matrixes through simulation.Then,the analytic hierarchy process was used to choose the most appropriate heuristic dispatching rule for the equipments,especially the batch processing machine groups.Finally,we conducted sensitivity analysis,and an effective way to manage the resources of semiconductor wafer fabrication system scientifically was pointed out at the same time.
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