A Multi-objective Real-time Dispatching Approach for Intrabay Material Handling Systems

Lihui Wu,Dengjie Zhu,Jie Zhang
DOI: https://doi.org/10.3969/j.issn.1004-132X.2013.06.013
2013-01-01
Abstract:To obtain better multi-objective comprehensive performances of the Intrabay material handling systems in semiconductor wafer fabrication systems (SWFSs), a fuzzy logic and Hungarian algorithm based dispatching approach was proposed. The approach responsed the system's dynamic events such as vehicle idling and wafer lot requiring for handling in real-time, and then solved scheduling sub-problems of Intrabay material handling system in the moments corresponding to these dynamic events. With experimental data from an Intrabay material handling system of 300 mm SWFSs, it is demonstrated that the proposed approach has better multi-objective comprehensive performances than both the traditional first encounter first served(FEFS) rule and the highest priority(HP) first served rule based dispatching approaches for Intrabay material handling systems.
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