Abstract:Three types of torsion/cantilever-based MEMS bistable mechanisms (BMs) with different support configurations have been constructed, modeled and experimented. For the support configuration, there is a crisscross-shaped, a ring-shaped and a diamond-shaped support beam, respectively. The proposed MEMS BMs consist of a free-free torsion-based cantilever which forms a symmetrical rocker lever. The free-free cantilever is suspended by a support skeleton which in turn is attached to a torsion cantilever. A permanent magnet is attached beside for holding the closed state with a permalloy soft magnetic circuit. The different special support configurations account for a low torsional compliance with the overhanging beams. In order to deduce the equivalent stiffness coefficient of BM systems, mechanical modeling of three types of torsion/cantilever-based MEMS BMs was performed by the classical beam theorem. Meanwhile, the magnetostatic latching force was also deduced by the Maxwell electromagnetism theory. The performances of these MEMS BMs have been compared by the evaluation of static deformation variations, equivalent stiffness coefficients and dynamical switching characterizations. Finally, mechanical performance was characterized by atomic force microscopy, combined with a Nanoindentation Tester. In addition, bistabilities of the MEMS BMs were proved by theoretical analysis as well as experimental results. Among these BMs, the ring-shaped MEMS BM is extremely prone to deflect due to relatively low stiffness compared with other types. The torsion/cantilever-based MEMS BMs have potential application in the field of latching relays with low power consumption.

Research and progress on compliant bistable mechanism

State-of-art of Compliant Mechanisms and Their Applications

A design approach to fully compliant multistable mechanisms employing a single bistable mechanism

Torsion/Cantilever-Based Mems Bistable Mechanisms with Different Support Configurations: Structure Design and Comparison

Achieving Multistability Through Use of a Single Bistable Compliant Mechanism

A Novel Fully Compliant Tensural-Compresural Bistable Mechanism

Design of compliant mechanisms using continuum topology optimization: A review

A 3-Dof Pseudo-Rigid-Body Model for Tension-Based Compliant Bistable Mechanisms

Design, Analysis, Experimentation, and Control of a Partially Compliant Bistable Mechanism

Task-driven geometric synthesis method of a bistable compliant mechanism for the rigid guidance problem

A Compliant 5-bar Tristable Mechanism Utilizing Metamorphic Transformation

Modeling of a bistable MEMS mechanism with torsion/cantilever beams.

Design of a Novel Compliant Constant-Force Mechanism with High Lateral Stiffness

Development of a Multistage Compliant Mechanism with New Boundary Constraint

Research Progress of Electroactive Bistable Mechanism and Its Application in Soft Robots

Design, modeling, analysis and testing of a novel piezo-actuated XY compliant mechanism for large workspace nano-positioning

Guest Editorial: Focused Section on Compliant Mechanisms for Mechatronics

Fully compliant bistable mechanisms with enhanced pitch stiffness

A Fully Compliant Tristable Mechanism Employing Both Tensural and Compresural Segments

Multistability of Compliant Sarrus Mechanisms

A Bi-Stable Mechanism Actuated by Patterned Permanent Magnet and Cu-Ni Integrated Micro-Coil