Modeling of a bistable MEMS mechanism with torsion/cantilever beams.
Yibo Wu,Juan Wang,Xiaobo Zhang,Congchun Zhang,Guifu Ding
DOI: https://doi.org/10.1109/NEMS.2010.5592168
2010-01-01
Abstract:A mechanical modeling of a novel bistable MEMS mechanism with a torsion/cantilever beam system is presented in this paper. The model includes mathematical solution to the system equivalent stiffness, and simulating analysis for the deformation under load. Meanwhile, the geometrical parameters of bistable system were optimized with Matlab software. And the optimization dimensions involves the length, width and thickness where l1= 1130μm, w1=100μm, t1=10μm for cantilever, and l2=500μm, w2=20μm, t2=10μm for torsional flexure, respectively. In addition, modal analysis was performed to determine the nature frequency of the torsion/cantilever beam system. The first four fundamental resonant modes consist of torsional, out-of-plane sliding, in-plane sliding and out-of-plane rocking mode. This proposed bistable mechanism can be suitable for bistable switching relay applications where low power consumption is requested. ©2010 IEEE.