Abstract:Polymeric optical waveguide devices with Bragg gratings have been investigated, for implementing tunable lasers and wavelength filters used in wavelength-division-multiplexed optical communication systems. Owing to the excellent thermo-optic effect of these polymers, wavelength tuning is possible over a wide range, which is difficult to achieve using other optical materials. In this study the phase-mask technology, which has advantages over the conventional interferometeric method, was introduced to facilitate the fabrication of Bragg gratings in polymeric optical waveguide devices. An optical setup capable of fabricating multiple Bragg gratings simultaneously on a 4-inch silicon wafer was constructed, using a 442-nm laser and phase mask. During fabrication, some of the diffracted light in the phase mask was totally reflected inside the mask, which affected the quality of the Bragg grating adversely, so experiments were conducted to solve this issue. To verify grating uniformity, two types of wavelength-filtering devices were fabricated using the phase-mask lithography, and their reflection and transmission spectra were measured. From the results, we confirmed that the phase-mask method provides good uniformity, and may be applied for mass production of polymer Bragg-grating waveguide devices.

A fabrication of coupling grating in the polymeric waveguide by using two-photon initiated photopolymerization

Fabrication of Polymer Optical Waveguides by Digital Ultraviolet Lithography

Polymer-waveguide Bragg-grating Devices Fabricated Using Phase-mask Lithography

Efficient Polymer Waveguide Grating Coupler with Directionality Enhancement

A Polymer-Based Surface Grating Coupler with an Embedded Si3n4 Layer

Synthesis and Charaterization of Crosslinkable Poly(MMA-co-GMA) and Its Application in Arrayed Waveguide Grating

Vertical Coupling Between Waveguides and Optical Fibers Utilizing Polarization Gratings

High-Efficiency and Polarization-Insensitive Grating Couplers on Thin-Film Lithium Niobate Waveguides

Polymer/Silica Hybrid Waveguide Bragg Grating Fabricated by UV-Photobleaching

Three Dimensional Polymer Waveguide Using Hybrid Lithography

Athermal Silicon Arrayed Waveguide Grating With Polymer-Filled Slot Structure

Design and Fabrication of Polymer Arrayed Waveguide Grating

Fabricated Technology for Polymer/si Arrayed Waveguide Grating

Research and Fabrication of a UV Curable Polymeric 41 × 41 Array‐waveguide Grating Multiplexer

Integration of a multimode interference coupler with a corrugated sidewall Bragg grating in planar polymer waveguides

In-fiber Polymer-Glass Hybrid Waveguide Bragg Grating.

Optimization and fabrication of a polymeric arrayed-waveguide grating multiplexer

Fabrication of Optical Organic Polymer Waveguides

Thermo-optically tunable arrayed-waveguide-grating made of polymer/Si

Polymeric Flat Focal Field Arrayed Waveguide Grating Using Electron-Beam Direct Writing

Synthesis of crosslinkable fluorinated polyesters for optical waveguide devices