Simulation and Fabrication of an SMA Electro-Thermal Actuator with Si/TiNi Bimorph Structure

Wang Yapan,Wu Yibo,Zhang Xiaobo,Zhang Congchun,Yang Chunsheng
DOI: https://doi.org/10.3969/j.issn.1671-4776.2010.02.007
2010-01-01
Abstract:TiNi-based shape memory alloy films were deposited on Si substrates by sputtering TiNi target.The composition of the film was tested by energy dispersive spectrograph(EDS).The results of differential scanning calorimetry(DSC)reveal the martensitic transformation and good shape memory effect upon heating and cooling.A type of shape memory alloy(SMA)actuator with a cantilever structure based on the TiNi/Si bimorph actuation mechanism was designed,and then was fabricated by using Si micro-machining technology.The cantilever of the actuator was flat at room temperature and bent up by applying voltage in the TiNi electrodes due to phase transformation and shape memory effect.The test results show that the displacement of the tip of the cantilever reaches 70.5 μm and power consumption is only 20 mW under 2.0 V driving voltage.
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