Top-Down Nanomechanical Machining of Three-Dimensional Nanostructures by Atomic Force Microscopy

Yongda Yan,Zhenjiang Hu,Xueshen Zhao,Tao Sun,Shen Dong,Xiaodong Li
DOI: https://doi.org/10.1002/smll.200901947
IF: 13.3
2010-01-01
Small
Abstract:A closed-loop nanoscale precision stage is integrated with an atomic force microscope to mechanically fabricate 3D nanostructures according to predetermined designs, such as 3D human face nanostructures, nanoline arrays of sine-wave and triangular nanostructures, and nanodot arrays of sine-shaped, hemispheric, and concave/convex nanopatterns in a controllable and reproducible fashion.
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