Research Of Resonant Frequency And Quality Factor Test Methods For High Vacuum Sealed Microgyroscope Based On Labview
Junjie Yan,Chunhua He,Fei Ge,Qiancheng Zhao,Jian Cui,Guizhen Yan
DOI: https://doi.org/10.1016/j.proeng.2011.08.482
2011-01-01
Abstract:In this paper, we demonstrate an efficient and precise method for measuring the resonant frequency and quality factor of high vacuum sealed microgyroscope based on the free vibration theory with NI platform. A comparison is carried out between the proposed method and the conventional sweep-frequency test method. Experiments indicate that the results obtained by these two methods are nearly the same for the low-Q (<2000) sealed gyroscopes. However, as for the high-Q (>50000) sealed gyroscopes, the consecutive-test-error and test-period of quality factor with sweep-frequency test method and the free vibration test method are about 2000, 10 minutes and 500, 5 seconds, respectively. Furthermore, sweep-frequency method extremely depends on experience while vibration method hardly does. The automatic test method based on vibration theory can much enhance the accuracy and efficiency of the performance test for high vacuum sealed gyroscope. (C) 2011 Published by Elsevier Ltd. Selection and/or peer-review under responsibility of [CEIS 2011]