An Analysis of the Kickout Mechanism in Silicon

MM DESOUZA,GAJ AMARATUNGA
DOI: https://doi.org/10.1016/0038-1101(94)00181-e
IF: 1.916
1995-01-01
Solid-State Electronics
Abstract:In this paper, the characteristics of the kickout mechanism of diffusion have been detailed. Solutions have been presented under thermodynamic equilibrium conditions for an initial delta function impurity of two types: (1) all atoms are initially on substitutional sites; (2) all atoms are initially on interstitial sites. The solutions in the two cases are shown to be different. Further the analysis is exact to first order terms in gr, where g is the generation rate and r the recombination rate. They are therefore more accurate than any presented so far and are applicable to dopants in silicon in the case of a dilute impurity.
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