DEVELOPMENT OF NANO-SCALE CHARACTERIZATIN TECHNIQUES BY AUGER ELECTRON SPECTROSCOPY

康俊勇,徐富春,蔡端俊,李金钗
DOI: https://doi.org/10.3321/j.issn:1000-0542.2008.04.001
2008-01-01
Abstract:Inspired by the rapid progresses and wide applications of nanostructured materials,novel nano-scale characterization techniques have attract much attention in nanoscience.Based on the concept of full information of local electron,we initiate with the principle of Auger electron spectrum,simplify the theoretical expression spectrum,reveal the intrinsic relationship between the valence-band Auger electron spectrum and the microscopic electronic structures,and develop a couple of novel nano-scale detection techniques for several important physical parameters.1) A technique for local strain measurement is achieved with a spatial resolution better 20nm,which provides an effective method for the investigations of mechanical properties in nano-scale;2) A non-contact probing of local charge and electric field exempts from the influence of external field and enables construction of energy band for semiconductor heterostructures,which is beyond the conventional frame of electrical measurement;3) A technique for structural phase identification is developed to distinguish local structures in nano-structural materials;4) A technique for determination of conductivity type in semiconductor is able to apply to the local type detection in complex structures of optoelectronic devices.Practical applications of these novel techniques have been carried out on nano and complex structures,such as epitaxial-lateral-overgrowth GaN,AlxGa1-xN/GaN superlattice,ZnO nanoparticle,and so on.A series of precise results and interesting phenomena about strain,charge concentration,electric field,structural phase,conductivity type,and their distributions have been obtained in these structures,which provided an objective evaluation for the solidity and effectiveness of these techniques.
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