Abstract:Silicon (Si) and/or germanium (Ge) nanomembranes (NMs) play crucial roles in various applications, including conventional microelectronics, as well as recently emerging high-performance flexible/stretchable electronics. Because of their superior mechanical properties, such as flexibility, strain-ability, and bond-ability, Si/GeNMs can be strain-engineered, functionalized, and assembled into two/three-dimensional (2D/3D) micro/nano-architectures and devices. These features offer significant opportunities in nanoscience and for the development of nanotechnology. Strain engineering of semiconductor NMs enables the modification of their physical properties, in particular those of Si and Ge (e.g., carrier mobility, band structure), thus creating enormous potential for use in high-speed rigid/flexible electronics, optoelectronics, and nanophotonics. The mechanical properties of NMs allow large deformations at the micro/nano-scale, via self-assembly or guided self-assembly, leading to 3D micro/nano-architectures, including tubes, wrinkles, buckles, and mesostructures. The transformation from 2D planar NMs to 3D micro/nano-architectures again strongly influences physical properties (e.g., mechanics, optics, and electronics), providing fascinating applications in sensing, energy harvesting, bio-integration, and flexible/stretchable electronics. In this Review, the recent progress in strain engineering and mechanical assembly of Si/GeNMs is reviewed, ranging from fundamental principles to device applications.

Wrinkled-up Nanochannel Networks: Long-Range Ordering, Scalability, and X-ray Investigation.

Ordered 3D ThinShell Nanolattice Materials with NearUnity Refractive Indices

Self-Organization of Linear Nanochannel Networks

Semiconductor Sub-Micro-/Nanochannel Networks by Deterministic Layer Wrinkling

Multiple-Patterning Nanosphere Lithography for Fabricating Periodic Three-Dimensional Hierarchical Nanostructures.

Experimental realization of coexisting states of rolled-up and wrinkled nanomembranes by strain and etching control

Wafer-scale Monodomain Films of Spontaneously Aligned Single-Walled Carbon Nanotubes

Shaped nanomembranes: From fundamental perception to new concepts and applications

Anisotropic nanoscale wrinkling in solid state substrates

A molecular dynamics investigation of the mechanical properties of graphene nanochains

(Invited) Physics and Applications of Spontaneously Aligned Macroscopic Nanotube Assemblies

Multiscale Periodic Assembly of Striped Nanocrystal Super Lattice Films on A Liquid Surface

Integrated Sensitive On-Chip Ion Field Effect Transistors Based on Wrinkled InGaAs Nanomembranes

Fabrication, Self-Assembly, and Properties of Ultrathin Aln/Gan Porous Crystalline Nanomembranes: Tubes, Spirals, and Curved Sheets

Blending of nanoscale and microscale in uniform large-area sculptured thin-film architectures

Multilevel Design and Construction in Nanomembrane Rolling for Three-Dimensional Angle-Sensitive Photodetection

Writing on Nanocrystals: Patterning Colloidal Inorganic Nanocrystal Films through Irradiation-Induced Chemical Transformations of Surface Ligands

Atomic-Scale-Deformation-Dynamics (asds) of Nanowires and Nanofilms

Insight on the regulation mechanism of the nanochannels in hard and brittle materials induced by sparially shaped femtosecond laser

Tunable Formation of Ordered Wrinkles in Metal Films with Controlled Thickness Gradients Deposited on Soft Elastic Substrates.

Strain Engineering and Mechanical Assembly of Silicon/germanium Nanomembranes