A study of fuzzy theory-based time-variable multiple-objectives scheduling for semiconductor manufacturing systems

Jiang Zhibin,Zhang Huai
DOI: https://doi.org/10.3772/j.issn.1002-0470.2008.07.014
2008-01-01
Abstract:The paper presents a fuzzy theory-based time-variable-multiple-objectives (TVMO) scheduling algorithm for achiev- ing complex semiconductor wafer fabrication systems (SWFS)' multiple-objective optimization and objective time-varia- tion.The fuzzy membership was assigned to describe the complex non-linear relations between the time-variable member- ship set and weight of different objective.Therefore,it provides a potential way to dealing with the scheduling optimiza- tion in the SWFS.Through above method of integration,each WIP wafer lot in the fab can get a distinct lot priority index of TVMO feature which is taking account of three multiple objectives such as maximum on-time delivery,maximum opera- tion moves and high equipment utilization.The results of a large number simulation experiment prove that the TVMO scheduling approach can improve those production indices of multiple objectives successfully.It also provides supports to the related researches of production scheduling and control for a typically large-scale complicated re-entrant manufacturing system (LSCRMS).
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