Production Scheduling Optimization with Time-Variable Multiple-Objectives for Semiconductor Wafer Fabrication System

LEE Yen-fei,JIANG Zhi-bin
DOI: https://doi.org/10.3321/j.issn:1006-2467.2008.02.012
2008-01-01
Abstract:This study presented a new methodology for solving time-variable-multiple-objectives(TVMO) scheduling optimization problems of a complex wafer fabrication.Simulation of the virtual wafer fabrication by simulated annealing(SA) under control of TVMO scheduling is an example of the evolutionary and practical methodology.Such methodology presents a practical and effective way to solve time-consuming issue of searching feasible solution and ensures the result can meet planner's quality requested.The study of production scheduling optimization provides positive support for related researches of production planning,scheduling, dispatching and control in the semiconductor manufacturing field.
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