Abstract:This study proposed a multi-objective optimization strategy to produce high-quality glass micro gratings. The applied methods include factor screening, surface response methodology (RSM), non-dominated sorting genetic algorithm (NSGA-II) and decision-making. Specifically, the significant factors were selected among several process parameters in hot embossing through screening experiments. Afterward, the regression models for the transferred ratio, uniformity of glass microstructures and warpage concerning those significant process parameters were established. Meanwhile, the significance of selected factors and their interactions was analyzed. Based on the regression models, the Parato front was obtained by using NSGA-II program, where the top 10 solutions were applied in glass hot embossing. Finally, a decision-making strategy was employed to further choose a feasible solution that allows the fabrication of glass micro gratings with a high transfer ratio, high uniformity, low warpage, low surface roughness, and no defect. The experimental results indicated that embossing temperature has the most significant effect on the replication accuracy of glass micro gratings, followed by embossing force and embossing time. However, warpage was not significantly sensitive to any process parameters in this hot embossing process. The defect-free glass micro gratings could be eventually fabricated under the optimal process parameters, achieving a transfer ratio and uniformity of higher than 95% and 83%, respectively. Moreover, their Ra surface roughness and warpage can be lower than 13 nm and 1.5 μm. The satisfactory quality of embossed micro gratings revealed that the proposed multi-objective optimization strategy is feasible in glass hot embossing.

OPTIMUM DESIGN OF PROCESSING CONDITION AND EXPERIMENTAL INVESTIGATION OF GRATING FABRICATION WITH HOT EMBOSSING LITHOGRAPHY

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Multi-objective optimization of hot embossing process for high-quality glass micro gratings

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Studies of Polymer Deformation and Recovery in Hot Embossing

Study on Polymer Flow Profile in Micro Hot Embossing

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