Abstract:In order to improve the coupling effect of focused laser and water-jet fiber, a new coupling system consisting of an accurate coupling alignment system and a special coupling unit was designed, and a special coupling alignment method also was put forward. Before laser arrives at water-jet fiber, it passes through air, glasses and water, so a laser burning method was used to determine the distance between focus lens and nozzle hole based on calculating result. The max angle of laser incidence was researched for full reflection. After fluid simulation, the coupling unit was designed to make the fluid field in the chamber symmetrically and form a high quality water-jet fiber with diameter of 0.12 mm. The attenuation of laser energy in water-jet fiber was investigated and the energy attenuation in fiber was reduced applying appropriate laser wavelength, pulse energy and filtered and deionized water. The experimental results indicate that a 100 mm long water-jet fiber is formed in this paper, and an 0.12 mm wide slot without nearly crack and heat affected is cut in 0.2 mm thick Si wafer at the speed of 2 mm/s, which shows proposed coupling technology can meet the requirements for water-jet guided laser micromachining perfectly.

Beam coupling in 2x2waveguide arrays in fused silica fabricated by femtosecond laser pulses.

Subwavelength-diameter Silica Wire for Light In-Coupling to Silicon-Based Waveguide

Design of a Beam-coupling System for a Chip-integrated Spectrometer with a Discrete Linear Waveguide

Compact 1 X 3 Waveguide Beam Splitters with Variable Splitting Ratios in LiNbO3 Crystal Fabricated by Femtosecond Laser Direct Writing

Ultracompact multiway beam splitters using multiple coupled photonic crystal waveguides

Calculation of the coupling coefficients for spatial waveguides using the field matching method

Coupling Characteristics of Electromagnetic Waves in Parallel Three Photonic Crystal Waveguides and Its Application

Ultracompact And Wideband Power Splitter Based On Triple Photonic Crystal Waveguides Directional Coupler

Robust Slab-Coupled Buried-Rib Semiconductor Laser with High Fibre Coupling Efficiency

Single-mode Fiber Auto-Coupling System with Wedges

Circular Cross Section Waveguides Processed by Multi-Foci-shaped Femtosecond Pulses.

Laser and water-jet fiber coupling technology for water-jet guided laser micromachining

Design and Analysis of 2×2 Half-Wave Waveguide Couplers

New channel guiding structures via femtosecond laser direct writing z-cut LiNbO 3 crystals

Fabrication of beam shapers in the bulk of fused silica by femtosecond laser pulses.

Coupling of Two-Dimensional Slab Photonic Crystal Micro-Cavities and Waveguides

Flexible optical waveguide beam splitters based on directional coupling

Femtosecond Laser Written Depressed-Cladding Waveguide 2 × 2, 1 × 2 and 3 × 3 Directional Couplers in Tm3+:YAG Crystal

Transverse Writing of Multimode Interference Waveguides Inside Silica Glass by Femtosecond Laser Pulses

Fabrication of optical elements in glass with fs laser pulses

An Integrated Pump-Controlled Variable Coupler Fabricated by Ultrafast Laser Writing