ZnO Nanorods Prepared by Magnetron Sputtering and Thermal Oxidation and Their Photoluminescence
LI Yu-guo,XUE Cheng-shan,ZHUANG Hui-zhao,SHI Li-wei,ZHANG Jie-shan,CAO Yu-ping,SUN Qin-jun
DOI: https://doi.org/10.3969/j.issn.1001-5868.2005.05.016
2005-01-01
Abstract:With radio frequency(RF) magnetron sputtering,ZnO nanorods are succesfully synthesized by oxidating metal zinc thin films on Si(111) substrates.X-ray diffraction,scanning electron microscopy,transmission electron microscopy and photoluminescence are employed to determine the structure,morphology and optical properties of the nanorods.Results show that the synthesized ZnO nanorods have a single-crystal hexagonal wurtzite structure.The diameters of the nanorods range from 30nm to 60nm,and the lengths of the nanorods are 2~8μm.Under 280nm light excitation,a strong and sharp near band-edge UV light emission band at 372nm and a relatively weak green deep-level light emission band at 516nm are observed from the ZnO nanorods,which indicates excellent crystallization and optical quality of the as-grown ZnO nanorods.