Fabrication of Nano-pore Array Structure TiO2 by Anodizing of Titanium Film

齐艳玲,朱艳兵,刘子庚,王为
DOI: https://doi.org/10.3969/j.issn.1001-3849.2008.10.001
2008-01-01
Abstract:TiO2 nano-pore array structure was prepared by anodizing of PVD titanium film in 1% HF solution.The researches show that the shape of the pore in TiO2 nano-pore film is circular and its distribution is uniform.The size of the pore is about 50 nm.Under the same anodizing time conditions,the thickness of TiO2 nano-pore film prepared at 15℃ 1% HF solution is thicker than that prepared at 25℃ 1% HF solution.The longer the anodizing time is,the thicker the TiO2 film is.
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