Design of Semiconductor Manufacturing Equipment Function Simulation System Based on SEMI Standard

WANG Wei,ZOU Long-qing,XU HUA,LI Bo,JIA Pei-fa,LI Lei
DOI: https://doi.org/10.3969/j.issn.1001-0548.2012.04.024
2012-01-01
Abstract:A general and configurable simulation platform based on SEMI standard is designed.On this general platform,a gas pressure subsystem simulation platform is implemented,which has the function layer,logic layer and communication interface layer.This system can meet the needs of both a single device and a whole system.Results show that the operation of the valve and the change of the gas flow in physical vapor deposition(PVD) system can be simulated in real time.
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