Abstract:This work analyses circuit phase delay for carrier-modulation MEMS capacitive gyroscopes. The temperature-dependent circuit phase delay is a major source of gyroscope output drift, which deteriorates the gyroscope bias instability (BI) and angle random walk (ARW). Effects of both drive-mode and sense-mode circuit phase delay on gyroscope performance when using different signal extraction architectures are analyzed in detail. The online suppression method which combines the so-called modified double sideband (MDSB) extraction architecture in the gyroscope drive mode and closed-loop force-rebalance loop in the sense mode can eliminate the impact of residual fluctuation error of circuit phase delay in real time. When drive-mode circuit phase delay equivalently varies from -20 degrees to 20 degrees, using MDSB decreases the fluctuation of the open-loop zero-rate output (ZRO) by 70% compared to using double sideband (DSB) and by 99.7% with respect to using single sideband (SSB). Meanwhile, improvement for the closed-loop ZRO using MDSB is 92.48% and 94% compared to cases using DSB and SSB, respectively. Furthermore, when the equivalent circuit phase delay of the sense-mode alters from -20 degrees to 20 degrees, ZRO variation for the gyroscope with force rebalanced sense loop and quadrature stiffness nulling loop decreases by 80% in contrast to the case with open loop, which demonstrates the effectiveness of online suppression for circuit phase delay of both the drive-mode and sense-mode. Using the online suppression method, the gyroscope has achieved a BI of 0.16 degrees h(-1) and ARW of 0.011 degrees (root h)(-1). Furthermore, using the MDSB in the drive mode obtains the best stability compared to using the DSB and SSB as the temperature changes.

Investigation on filter methods of MEMS gyros drift data

Error Modeling and Filtering Method for MEMS Gyroscope

Analysis on Digital Automatic Gain Control of MEMS Gyro Driven-Loop Circuit

Modeling and Simulation of Micromachined Gyroscope

Performance Improvement for MEMS Gyroscopes by Suppressing the Circuit Phase Delay

A New Modeling Method of MEMS System's Noise

Effects Of Both The Drive- And Sense-Mode Circuit Phase Delay On Mems Gyroscope Performance And Real-Time Suppression Of The Residual Fluctuation Phase Error

Application of Gradient Radial Basis Function Network in the Modeling of MEMS Gyro's Random Drift

Design and Test of MEMS Gyroscope Control System Based on LMSD

A Novel Filtering Method for the Random Drift of MEMS Gyroscope

One-time Frequency Sweep to Eliminate IQ Coupling in MEMS Vibratory Gyroscopes

Noise Analysis and Modeling for a Digital Control Architecture for Lissajous Frequency-Modulated MEMS Gyroscope with Amplitude-Modulated Readout

Research of On-Line Modeling and Real-Time Filtering for MEMS Gyroscope Random Noise

Random Noise Filtering Technology of Piezoelectricity Gyro

Noise Reduction of MEMS Gyroscope Based on Direct Modeling for an Angular Rate Signal

An Adaptive Filtering Approach Based on the Dynamic Variance Model for Reducing MEMS Gyroscope Random Error

A Noise Reduction Method for Dual-Mass Micro-Electromechanical Gyroscopes Based on Sample Entropy Empirical Mode Decomposition and Time-Frequency Peak Filtering

Modeling And Compensation Of Random Drift Of Mems Gyroscopes Based On Least Squares Support Vector Machine Optimized By Chaotic Particle Swarm Optimization

Mems Gyroscope Bias Drift Self-Calibration Based On Noise-Suppressed Mode Reversal

Research on Low Temperature Drift Suppression of Micro-Machined Gyroscope Based on Self-Calibration Technology

Study of the Influence of Phase Noise on the MEMS Disk Resonator Gyroscope Interface Circuit