Analysis of Relaxation of Cantilever Beam Based on Euler-Bernoulli Equation

PENG Shou-jun,WANG Wen-fang,GONG Sheng-ping
DOI: https://doi.org/10.3969/j.issn.1673-9965.2012.07.002
2012-01-01
Abstract:The paperaims to explore the dynamic characteristic of the relaxation of the cantilever beam of MEMS.The beam deflection relaxation expression was a deduced with separating variables method based on Euler-Bernoulli equation.The numerical calculation of beam deflection relaxation under critical-damping,over-damping and under-damping was done by using Maple.The critical-damping,over-damping and under-damping relaxation process were simulated by using rayleigh damping mode in ANSYS.The simulation result demonstrates that difference of between the simulation and the theoretical relaxation process is greater near the fixed ends of the cantilever beam.The deviation of ANSYS simulation data from the theoretical calculation increases with the beam deflection.
What problem does this paper attempt to address?