Monte Carlo Simulation of Electron Swarm Parameters in the SF6/CF4 Gas Mixtures

Xueli Liu,Dengming Xiao

DOI: https://doi.org/10.1143/jjap.46.1663

IF: 1.5

2007-01-01

Japanese Journal of Applied Physics

Abstract:We use a binary gas mixture Monte Carlo simulation model to calculate the electron transport parameters in SF6/CF4 mixtures in uniform electric fields. Electron collision cross section sets are assembled on the basis of the critical survey of Christophorou et al. [J. Phys. Chem. Ref. Data 25 (1996) 1341] for CF4 and Itoh et al. [J. Phys. D 21 (1988) 922] for SF6. The electron swarm parameters studied here are electron drift velocity, effective ionization coefficient and the ratio of longitudinal diffusion coefficient to mobility for the density-reduced electric field strength (E/N) in the range of 140≤E/N≤600 Td (1 Td = 10-17 V cm2); the SF6 contents in the gas mixtures are 0, 20, 50, and 100%. The differences between the present calculated and measured values of Urquijo et al. [J. Phys. D 36 (2003) 3132] do not exceed the overall measured uncertainties for the parameters. To our knowledge, only Urquijo et al. [J. Phys. D 36 (2003) 3132] have measured the electron swarm parameters in SF6/CF4 gas mixtures by a pulsed Townsend technique; however, simulation results have scarcely been reported.