A Novel Measurement Scheme For Periodic Fouling In Recipe Alternation Based On Hybrid Fuzzy Neural Network

Db Hou,Zk Zhou
DOI: https://doi.org/10.1109/icsmc.2005.1571323
2005-01-01
Abstract:For on-line measuring the periodic fouling resistance in recipe alternation, a novel soft-sensing approach based on FNN (Fuzzy Neural Network), FCM (Fuzzy c-means clustering) and OED (Orthogonal Experimental Design) was investigated. The periodic fouling resistance is modeled by two parts: the increase of short-term fouling in one batch and the long-term irreversible fouling at the beginning of the batch. FCM algorism was used to cluster all the recipes into classes, and give each recipe a fuzzy membership belongs to one class. Based on the membership matrix, a FCM neuron was designed and accordingly a hybrid FMV that is robust to recipe alternation was proposed. OED were used to select out the key parameters influencing the long-term fouling and short-term fouling respectively. Two Hybrid FNN networks are trained to learn the formation trends of the short-term fouling and long-term fouling trend. The new measurement scheme combines the advantages of FCM, OED and FAW, have a good performance to predict the fouling in recipe alternation. The experimental results and the comparison to other methods show the new scheme is effective.
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