Image-Based Auto-Focus Microscope System with Visual Servo Control for Micro-Stereolithography
Yijie Liu,Xuexuan Li,Pengfei Jiang,Ziyue Wang,Jichang Guo,Chao Luo,Yaozhong Wei,Zhiliang Chen,Chang Liu,Wang Ren,Wei Zhang,Juntian Qu,Zhen Zhang
DOI: https://doi.org/10.3390/mi15101250
IF: 3.4
2024-10-12
Micromachines
Abstract:Micro-stereolithography (μSL) is an advanced additive manufacturing technique that enables the fabrication of highly precise microstructures with fine feature resolution. One of the primary challenges in μSL is achieving and maintaining precise focus throughout the fabrication process. For the successful application of μSL, it is essential to maintain the sample surface within a focal depth of several microns. Despite the growing interest in auto-focus devices, limited attention has been directed towards auto-focus systems in image-based auto-focus microscope systems for precision μSL. To address this challenge, we propose an image-based auto-focus microscope system incorporating visual servo control. In the optical design, a transflective beam splitter is employed, allowing the laser beam to pass through for fabrication while reflecting the focused beam on the sample surface to the microscope and camera. Utilizing captured spot images and the Foucault knife-edge test, a deep learning-based laser spot image processing algorithm is developed to determine the focus position based on spot size and the number of spot pixels on both sides. Experimental results demonstrate that the proposed auto-focus system effectively determines the relative position of the focal point using the laser spot image and achieves auto-focusing through visual servo control.
chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied