Abstract:Carbon dioxide ( <math display="inline"> <mrow> <msub> <mrow> <mi mathvariant="normal">C</mi> <mi mathvariant="normal">O</mi> </mrow> <mn>2</mn> </msub> </mrow> </math> ) is a gas vital for life on Earth. It is also a waste product of human activities and is widely used in agriculture and industry. Its accurate sensing is therefore of great interest. Optical sensors exploiting the mid-infrared light absorption of <math display="inline"> <mrow> <msub> <mrow> <mi mathvariant="normal">C</mi> <mi mathvariant="normal">O</mi> </mrow> <mn>2</mn> </msub> </mrow> </math> provide high selectivity, but their large size and high cost limit their use. In this Letter, we demonstrate <math display="inline"> <mrow> <msub> <mrow> <mi mathvariant="normal">C</mi> <mi mathvariant="normal">O</mi> </mrow> <mn>2</mn> </msub> </mrow> </math> gas sensing at 4.2 µm wavelength using an integrated silicon waveguide, featuring a sensitivity to <math display="inline"> <mrow> <msub> <mrow> <mi mathvariant="normal">C</mi> <mi mathvariant="normal">O</mi> </mrow> <mn>2</mn> </msub> </mrow> </math> of 44% that of free-space sensing. The suspended waveguide is fabricated on a silicon-on-insulator substrate by a single-lithography-step process, and we route it into a mid-infrared photonic circuit for on-chip-referenced gas measurements. Its demonstrated performance and its simple and scalable fabrication make our waveguide ideal for integration in miniaturized <math display="inline"> <mrow> <msub> <mrow> <mi mathvariant="normal">C</mi> <mi mathvariant="normal">O</mi> </mrow> <mn>2</mn> </msub> </mrow> </math> sensors for distributed environmental monitoring, personal safety, and medical and high-volume consumer applications.

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