Abstract:The thermal stability of the dual phase AlCrFeCoNiCu 0.5 high entropy alloy thin films at up to 600 °C under vacuum was studied through detailed characterization. The evolution of microstructure and chemical composition was revealed by X-ray diffraction, transmission Kikuchi diffraction and transmission electron microscopy . Also, the mechanical properties were measured by nanoindentation . Although the crystalline phase of all the HEA thin films was BCC-dominated, the FCC phase fraction increased from 16.6% (as-deposited) to 28.1% (600 °C-annealed). The as-deposited films exhibited a columnar morphology with an average grain size of 106.1 nm for length and 31.3 nm for width and remained the columnar shape until 600 °C. The columnar grains showed an increasing tendency of size at 200 °C (221.3 nm and 45.6 nm for length and width) and 400 °C (283.9 nm and 56.2 nm). At 600 °C, the columnar grain size decreased to 211.8 nm in length and 59.3 nm in width. Concurrently, the occurrence of new equiaxed grains was observed with an average diameter of 42.4 nm. The reduction of columnar grain size and the formation of equiaxed grains at 600 °C were explained based on the energy dispersive spectroscopy. Although no preferential evaporation was found, the elemental distribution revealed the formation of two secondary phases, i.e., Cu-rich FCC phase and Cr-rich BCC phase. The nanoindentation results indicated that the mechanical properties increased as the increase of annealing temperature. The hardness and elastic modulus of 600 °C-annealed sample were 8.5 ± 0.3 GPa and 205.4 ± 3.5 GPa, respectively, which were 10.4% and 41.5% higher than those of the as-deposited thin film. These findings are critical for a fundamental understanding of the microstructure and properties change of the dual-phase HEA thin films in high working temperatures.

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