Development of Multiscale Simulation System for Nano-Processes

Huawei Chen,A. K. Tieu,I. Hagiwara
DOI: https://doi.org/10.4028/www.scientific.net/kem.407-408.452
2009-01-01
Abstract:In contrast to microscale method (molecular dynamics) or macroscale method (FEM), multiscale modeling is a new, fast developing and challenging scientific field with contributions from many scientific disciplines in an effort to assure materials simulation across length/time scale. In this paper-we propose MPM/MD handshaking method to establish multiscale modeling of thin film formation/nanocutting. First, the detailed handshaking method is presented for large scale simulation along with basic principles of the multiscale approach. Then, quantitative items: flatness, cutting force, adhesion between cluster and substrate, etc. are provided to avoid drawbacks of current qualitative manner. Finally, simulations are carried out to clarify the efficiency of system.
What problem does this paper attempt to address?