Abstract:Micro-electro-mechanical system (MEMS) based mass spectrometry, MEMS mass spectrometry, emerges a new technique branch of miniature mass spectrometry. One of the main challenges hindering the development of MEMS mass spectrometry is the poor compatibility between the complex electrode structure of traditional ion optics and MEMS processes. This paper proposed a planar quadrupole mass filter utilizing a highly simplified stacked-layer structure and film electrodes, which is easy to fabricate with high precision by MEMS surface micromachining. The ion trajectory simulation model of the MEMS mass spectrometry chip involving all necessary ion optics was elaborated for investigating the preliminary performance of the planar quadrupole mass filter. By optimizing the crucial parameters such as the frequency of radio frequency voltage, the ratio of direct current voltage and radio frequency voltage, pre-pole length, main-pole length, and injection kinetic energy, the preliminary simulation result of planar quadrupole mass filter achieved a 1∼2Da peak width (at 50% of peak height) and 20∼80% ion transmission efficiency. Importantly, the planar quadrupole mass filter demonstrated a maximum working pressure of 0.1 Pa (using air as the buffer gas), 100 times higher than that of conventional quadrupole mass filters, while maintaining a 0.7∼1.8 Da peak width and ∼5% ion transmission efficiency. Additionally, to modify the theoretical formulas for the non-ideal quadrupolar field of planar quadrupole mass filter, a novel approach based on stability diagrams obtained by simulation was also introduced. The pretty good linearity (R 2 =1) between ion masses in the range of 10 to 100Da and the corresponding radio frequency voltages was verified through the simulated mass spectra. Notably, the proportional coefficient of ion mass and radio frequency voltage exhibited a minimal 4% deviation between the simulated value (4.7132 V 0P /Da) and the calculated value (4.9036 V 0P /Da) through the modified formula. In conclusion, the preliminary simulation results demonstrated that the planar quadrupole mass filter possessed moderate performance, high-pressure tolerance, and excellent theoretical consistency, which proved it a promising technology of MEMS mass spectrometry. It can find applications in the fields of gas detection, including the rapid response to hazardous gas emissions and in situ detection of dissolved gases in the deep sea.

Characteristics and Comparison of Different Radiofrequency-Only Multipole Cooling Cells.

Simulation Study of Three New Quadrupole Ion Funnels to Improve Low-Mass Ion Transmission.

Ion transport and gas collision effects in a radio frequency quadrupole cooler: installation in the Eltrap solenoid and beam calculations

Parametric Evaluation of Laser Ablation and Ionization Time-of-flight Mass Spectrometry with Ion Guide Cooling Cell

Design and Cold Model Experiment of a Continuous-Wave Deuteron Radio-Frequency Quadrupole

Ion trajectory simulations of a conical octopole ion guide and its comparison with a parallel one in chemical ionization mass spectrometric applications

Quadrupole mass filters with octopole fields.

Possibility of operating quadrupole mass filter at high resolution

Mass Selection of Ions from Beams Using Waveform Isolation in Radiofrequency Quadrupoles

Direct ion imaging approach for investigation of ion dynamics in multipole ion guides

A comparison of continuous and pulsed sideband cooling on an electric quadrupole transition

Dipole and quadrupole resonance excitation in linear quadrupoles

Application and Development of Quadrupole Electrode System in Mass Spectrometry

Simulation of a Quadrupole Mass Filter with Octupole Field

Design of a CW BISOL RFQ for Three Kinds of High-Charge-State Ions Simultaneous Acceleration

Simulation Study of a Planar Quadrupole Mass Filter for MEMS Mass Spectrometer

Ion Storage, Cooling and Applications in Quantum Frequency Standards

A Conjoined Rectilinear Collision Cell and Pulsed Extraction Ion Trap with Auxiliary DC Electrodes

Optimization of an ultrasonic ionization source using a Quadrupole Time-of-flight mass spectrometry

The Effect of Higher Order Multipole Fields on the Property of Quadrupole Mass Filter

Mass filter with phase modulation of radio frequency voltage