Modulation technology for the image of TEM filament

Dong Quanlin,Li Peng,Feng Di,Yang Yanjie,Cui Yongjun,Nan Guo,Li Wenping
DOI: https://doi.org/10.3969/j.issn.1002-8978.2012.04.020
2012-01-01
Abstract:In working status,Transmission electronic microscope(TEM) requires precise alignment.As a major component of electronic microscope electronic optical system,electron gun must be strictly alignment with magnetic lens system,otherwise the electron beam reaching sample will be reduced and spherical aberration will be brought in.In operation the symmetry of image of TEM filament can be used to judge whether the electron gun has been in alignment.This article mainly researches the modulation technology for the image of TEM filament.According to the actual modulating process,combined with reference documents,the modulation technology for the image of TEM filament is summarized and verified by TDX-200.
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