Research Progress of Metal Oxide Semiconductor Gas Sensors

CUI Jinghui,LI Qiang,XIA Jinfeng,FENG Tao
DOI: https://doi.org/10.3969/j.issn.1000-2278.2013.03.022
2013-01-01
Journal of Ceramics
Abstract:Metal oxide semiconductor gas sensors are widely used as detecting gases.Meanwhile the factors that influence their gas sensing property are sensitivity,selectivity,stability,response time and repetitiveness.Researchers are devoting themselves to improving the sensitivity of the gas sensors for their importance of measuring.The experiment results indicate that sensitivity is related to surface reaction,which is mainly influenced by chemical components,surface-modification,microstructure of a sensing film,temperature,and humidity.
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