Analysis of the Breakdown Mechanism and Characteristics of Super-Junction

SUN Jun,WANG Cai-lin,GAO Yong
DOI: https://doi.org/10.3969/j.issn.1005-9490.2008.03.075
2008-01-01
Abstract:The depletion layer and electric field distributions of Super-Junction under blocking state were simulated by ISE simulator,based on which,the breakdown mechanism of SJ was explained.The influence of the key parameters, such as pillar width and pillar concentration,on SJ breakdown voltage was analyzed. The results show that the breakdown mechanism of Super-Junction differs greatly from that of cylinder junction.The breakdown of Super-Junction doesn’t occur at inflexion of junction.The breakdown voltage and its stability can be improved by adjusting the width and concentration of the pillar at device terminal region.
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