DhO3l Type High Dissolved Ozone Water Produce Equipment

BAI Mindi,LENG Hong,ZHU Yupeng,LI Chaoqun

DOI: https://doi.org/10.3969/j.issn.1004-4507.2010.12.003

2010-01-01

Abstract:With the development of ultra large scale integrated circuits,High Dissolved Ozone water is the key of Silicon Wafer Cleaning.Therefore,The China's first High Dissolved Ozone Water Device of dho3l with dissolved ozone concentration up to 20～30 mg/L has successfully developed by Dalian Maritime University Environmental Engineering Research Institute.The devices uses strong electric field ionization discharge method,O2 and H2O is ionized in active oxygen species O2+、O3、O(1D)、O(3P) and initiator HO2–.Under the initiator HO2–,O3 react with H2O to product high dissolved ozone water.The devices have high dissolved ozone concentration,high degree of automation,low energy consumption,small volume,high performance-price ratio,ect..The paper describes the advanced technology and performance of the devices of dho3l.