Numerical Value Analysis of Multi-beam Electron Beam Scanning Deflection Coil Electromagnetic Field

王西昌,赵海燕,左从进,王欣
DOI: https://doi.org/10.3969/j.issn.1003-5311.2008.10.005
2008-01-01
Abstract:It can achieve the precise control of deflection of the electron beam and generate the multi-beam by using the scanning deflection coil with multi pole shoe structure.It is necessary to be deeply studied because of the distribution of electromagnetic field has great influence on the deflection effect of electron beam.This paper carries on the three-dimensional static electromagnetic field analysis on the electron beam scanning deflection coil with multi pole shoe structure.And then gets the different distribution result of the coil electromagnetic field with multi-polar shoe structure through the finite element analysis software ANSYS.We can get the different distribution result of the coil electromagnetic field through analysis,and then carry the test experiment on some results.This analysis method is help to optimize the coil structure design,improve the coil manufacturing precision,control the coil volume effectively and reduce the waste of materials.
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