Diffraction image in an optical microscope: application to detection of birefringence

Bing Zhao,Zhengyuan Cao,Ruhua Fang,Anand Asundi
DOI: https://doi.org/10.1117/1.1458550
IF: 1.3
2002-01-01
Optical Engineering
Abstract:A new method for weak birefringence inspection is proposed. Based on the models of Kubota and Inoue and Hansen and Conchello, the formulation of the diffracted pattern of a point source transmitting through a sample with weak birefringence is carried out. An optical polarizing microscope is used to measure the retardation and the optic axis of the sample. The condenser of microscope is replaced by a 100X/1.25 numerical aperture (NA) objective to increase the birefringence measurement sensitivity. This method is suitable for both visual and quantitative detection of weak birefringence. Tests on plastic films and CID substrates are conducted. (C) 2002 Society of Photo-optical Instrumentation Engineers.
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