Theoretical Analysis and Experimental Study of a Planar Type MEMS Electromagnetic Actuator

YANG Hao-yu,ZHAO Xiao-lin,DAI Xu-han,SHAO Guo-cheng,DING Gui-fu
DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.05.162
2006-01-01
Abstract:A planar type MEMS electromagnetic actuator is described. Based on the network sloving method of magnetic circuits, considering the structural characteristic of planar coil, a comparison is made between two ways for nonlinear modeling of the device: distributed mechod and lumped method. The experimental results indicate that it is much more reliable to build a model considering the distributing effects caused by different radius of every coil turn. And this model helps to quantify the structure relying flux and magnetic force. Thus a theoretical method of further optimizing the device is provided.
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