A Test Model of Integrated Circuit Manufacture Equipment for Automatic Test System

Su Xiaoshan,Tian Ling
DOI: https://doi.org/10.16526/j.cnki.11-4762/tp.2012.06.036
2012-01-01
Abstract:This paper proposes a hierarchical test model of typical integrated circuit manufacture equipment for automatic test system.The model use a hierarchical method to build test models for integrated circuit manufacture equipment,which are modeled as three levels of equipment,subsystem and instrument.XML format is used to describe the model and different levels of models are reused by reference.This paper also proposes a validation algorithm to ensure the correctness of referenced models with time information and GUID.The model is applied in a typical IC manufacturing equipment with process chamber,which can not only improve the reusability of test models but also broaden the test range for different units under test.
What problem does this paper attempt to address?