Abstract:Highlights • Performance of the MIMO systems declines when geometric and mechanical parameters are inaccurate. • Traditional calibration of these parameters by means of measurement is complicated. • Optimizing the decoupling matrix directly with measurement data. • A calibrated static decoupling matrix with consistency can be obtained using instrument variable. Decoupling control is a commonly employed technique for achieving high precision in multiple-input multiple-output (MIMO) motion control systems. A static decoupling matrix, which can be determined using geometric construction, is widely used due to its practicality and simplicity. However, inaccurate geometric parameters will lead to a coarse decoupling matrix, and result in interactions among the system axes and performance deterioration. To tackle this challenge, various attempts have been undertaken to calibrate the decoupling matrix. Data-driven on-line approaches have gained considerable attention for their ability to calibrate the decoupling matrix without interrupting the normal operation of the system. This paper presents a data-driven approach to calibrate the decoupling matrix for MIMO and linear time invariant (LTI) systems. Through some reasonable assumptions, a calibrated static decoupling matrix can be derived to improve the performance of the system. Moreover, considering the inevitable presence of measurement noise, the consistency of the proposed method has been analyzed. As a result, the instrument variable is introduced in the improved method to eliminate the impact of the measurement noise. Finally, the effectiveness and practicality of the proposed method are demonstrated through both numerical simulations and experiments carried out on an ultraprecision wafer stage.

MIMO identification of 3 DOF planar micro positioning stage

Mimo Process Identification for Controller-Design - Test Signals, Nominal Model and Error-Bounds

Identification for Robust Control; MIMO Case

Multivariable Process Identification Based on Frequency Domain Measures

Closed-Loop Identification Of Coprime Factors

Identification of Multiple Input Multiple Output Motion System with Flexible Structures

Towards a multivariable auto-tuner

Closed-Loop Subspace Identification Of Mimo Motion System With Flexible Structures For Motion Control

Frequency Domain Identification of Multi-Input, Multi-Output Systems Considering Physical Relationships Between Measured Variables

MIMO decoupling control based on support vector machines αth-order inversion

Finite Time Performance Analysis of MIMO Systems Identification

Coupled Dynamic Modeling and Analysis of Ultra-precision 6-DOF Fine Stage

Nonorthogonal waveform assisted DOA estimation for joint MIMO sensing and communication

Model plant mismatch detection algorithm based on subspace approach

SIMULTANEOUS STABILIZATION OF THE MIMO STRICTY PROPER PLANTS

Computationally efficient MIMO system identification using Signal Matched Synthesis Filter Bank

Data-driven calibration of decoupling matrix for MIMO precision motion stages

A VSC method for MIMO systems based on SVM

Two-Stage Channel Estimation for Hybrid RIS Assisted MIMO Systems

RIS-Position and Orientation Estimation in MIMO-OFDM Systems with Practical Scatterers

Gaussian Message Passing Iterative Detection for MIMO-NOMA Systems with Massive Access