Abstract:Despite the superiority in quantum properties, self-assembled semiconductor quantum dots face challenges in terms of scalable device integration because of their random growth positions, originating from the Stranski-Krastanov growth mode. Even with existing site-controlled growth techniques, for example, nanohole or buried stressor concepts, a further lithography and etching step with high spatial alignment requirements isnecessary to accurately integrate QDs into the nanophotonic devices. Here, we report on the fabrication and characterization of strain-induced site-controlled microcavities where site-controlled quantum dots are positioned at the antinode of the optical mode field in a self-aligned manner without the need of any further nano-processing. We show that the Q-factor, mode volume, height, and the ellipticity of site-controlled microcavities can be tailored by the size of an integrated AlAs/Al2O3 buried stressor, with an opening ranging from 1 to 4 $\mu$m. Lasing signatures, including super-linear input-output response, linewidth narrowing near threshold, and gain competition above threshold, are observed for a 3.6-$\mu$m self-aligned cavity with a Q-factor of 18000. Furthermore, by waiving the rather complex lateral nano-structuring usually performed during the fabrication process of micropillar lasers and vertical-cavity surface emitting lasers, quasi-planar site-controlled cavities exhibit no detrimental effects of excitation power induced heating and thermal rollover. Our straightforward deterministic nanofabrication concept of high-quality quantum dot microcavities integrates seamlessly with the industrial-matured manufacturing process and the buried-stressor techniques, paving the way for exceptional scalability and straightforward manufacturing of high-\b{eta} microlasers and bright quantum light sources.

Microphotoluminescence perpendicular to the growth direction of quantum nanostructures

Photoluminescence Imaging Based Nano-Positioning of Single Quantum Dots for High-Performance Single-Photon Generation

Nanoscale optical positioning of single quantum dots for bright and pure single-photon emission

Photoluminescence Enhancement of Colloidal Quantum Dots Embedded in a Microcavity

Sub-nanometre resolution in single-molecule photoluminescence imaging

Individually Resolved Luminescence from Closely Stacked GaN/AlN Quantum Wells

Combined atomic force microscopy and photoluminescence imaging to select single InAs/GaAs quantum dots for quantum photonic devices

Single quantum dot selection and tailor-made photonic device integration using nanoscale focus pinspot

Strain Spectrally-Tunable Single-Photon Source Based on a Quantum Dot in Microcavity (conference Presentation)

Combined metallic nano-rings and solid-immersion lenses for bright emission from single InAs/GaAs quantum dots

{\it In-situ} Laser Microprocessing at the Quantum Level

Optical positioning of single quantum dots in micropillar with >65% extraction efficiency for on-demand quantum light sources

Enhanced photon-extraction efficiency from deterministic quantum-dot microlenses

Direct-write projection lithography of quantum dot micropillar single photon sources

Combined Optical Trapping and Microphotoluminescence of Single InP Nanowires

Self-aligned photonic defect microcavities with site-controlled quantum dots

Collecting Quantum Dot Fluorescence with a Hybrid Plasmonic Probe

Photonic crystal enhanced fluorescence emission and blinking suppression for single quantum dot digital resolution biosensing

Near-field collection of fluorescence of quantum dots with a fiber-integrated multimode plasmonic probe

Femtosecond Laser Induced Resonant Tunneling in an Individual Quantum Dot Attached to a Nanotip

Single quantum dot spectroscopy using a fiber taper waveguide near-field optic