High-quality VO 2 thin films sputter-deposited on borosilicate glass substrates for modulating solar transmission and thermal emission

Dongkyun Kang,Jaehyeong Kim,Myeongkyu Lee
DOI: https://doi.org/10.1016/j.jallcom.2024.176793
IF: 6.2
2024-10-07
Journal of Alloys and Compounds
Abstract:M1-phase VO 2 exhibits a reversible phase transition between the insulating and metallic states at T = ∼341 K, and VO 2 -based smart windows have been extensively studied. The smart window application requires the growth of high-quality VO 2 films with a large resistivity change and small hysteresis width (Δ T ) on glass substrates using a scalable deposition method such as sputtering. However, the polymorphic nature of VO 2 makes it challenging to obtain high-quality VO 2 films on ordinary window glasses (borosilicate and soda-lime glasses). Thus far, VO 2 films sputtered on glass substrates have exhibited resistivity changes of 1.5–2 orders of magnitude and Δ T = 3–19 °C. In this study, we show that high-quality VO 2 films with a resistivity change of 2.5−3.0 orders of magnitude and Δ T = 2 °C can be grown on borosilicate glass substrates via radio-frequency sputtering followed by thermal annealing. The simultaneous achievement of such a large resistivity change and small hysteresis width is highly encouraging not only for smart windows but also for other applications. With respect to the modulation of solar transmission and thermal emission with temperature, the performance levels of the produced VO 2 films were 70−75 % of those expected from pure M1-phase VO 2 films.
materials science, multidisciplinary,chemistry, physical,metallurgy & metallurgical engineering
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