Preparation of laser induced periodic surface structures for gas sensing thin films and gas sensing verification of a NiO based sensor structure

Ivan Hotovy,Johann Zehetner,Vlastimil Rehacek,Miroslav Mikolasek,Ivan Kostic,Stanislava Serecunova,Dana Seyringer,Fadi Dohnal
DOI: https://doi.org/10.2478/jee-2024-0004
2024-02-01
Journal of Electrical Engineering
Abstract:Abstract This study presents different approaches to increase the sensing area of NiO based semiconducting metal oxide gas sensors. Micro- and nanopatterned laser induced periodic surface structures (LIPSS) are generated on silicon and Si/SiO 2 substrates. The surface morphologies of the fabricated samples are examined by FE SEM. We select the silicon samples with an intermediate Si 3 N 4 layer due to its superior isolation quality over the thermal oxide for evaluating the hydrogen and acetone sensitivity of a NiO based test sensor.
engineering, electrical & electronic
What problem does this paper attempt to address?