Additive and subtractive manufacturing of gold micro/nanostructures by using laser trapping and ablation

Hong-Zhong Cao,Liang-Cheng Cao,Gan Fang,Yuan-Yuan Zhao,Guo-Juan Xu,Zhong-Yun Chen,Xuan-Ming Duan
DOI: https://doi.org/10.1016/j.optlaseng.2022.106959
IF: 5.666
2022-05-01
Optics and Lasers in Engineering
Abstract:Gold micro/nanostructures were additively manufactured by using laser trapping of gold nanoparticles in an aqueous solution. Gold wire composed of sintered compacted nanoparticles with spatial resolution of 470 nm was fabricated. Influence factors for wire fabrications were also studied systematically. In order to investigate the fabrication capacity of this technology for three-dimensional structures, several microstructures were fabricated. A new additive and subtractive hybrid manufacturing technology by using laser trapping and ablation was proposed and realized to further improve the spatial resolution of the fabricated structures. A gold microring with line width of 37 nm was fabricated through precisely controlling fabrication parameters. This hybrid manufacturing technology has great application prospects in the fabrication of high spatial resolution nanostructures.
optics
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