Chromatic focus variation microscopy for surface metrology

Aalim Mustafa,Hussam Muhamedsalih,Dawei Tang,PRASHANT KUMAR,Xiangqian Jiang
DOI: https://doi.org/10.1364/oe.528285
IF: 3.8
2024-09-19
Optics Express
Abstract:Aalim M. Mustafa, Hussam Muhamedsalih, Dawei Tang, Prashant Kumar, Jane Jiang Optical metrology plays a vital role in a wide range of research and inspection areas in the industry. At present, the market offers a ... [Opt. Express 32, 35527-35541 (2024)]
optics
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