Analysis of temperature field uniformity on polysilicon reduction furnace chassis

Wang Xiao-jin
Abstract:According to a cooling mode of 24 rods polysilicon reduction furnace chassis,the software Fluent is used to simulate the fluid in the chassis of the furnace. The temperature field distribution of the upper board of chassis is drawn and introduced the concept of Arithmetic Average Temperature and Uniformity Coefficient to analyze the temperature field uniformity of the chassis. Finally,the trend that temperature field uniformity is changed along with the inlet flow of cooling fluid is summed up. The criterion of judging temperature field uniformity is put forward with an appropriate cooling flow as reference.
Materials Science,Engineering
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